Brooks 5850E质量流量控制器

成都四洋科技供应 布鲁克斯5850e质量流量控制器accurately measures and controls gas flows. The heart准确地测量和控制气体流量。心of the system is the removable flow sensor which该系统是可移动的流量传感器produces an electrical output signal linear with flow rate产生的电输出信号的非线性的流量used for indicating, recording, and/or control purposes.用于指示，记录，和/或控制的目的。It eliminates the need for continuous monitoring and它不需要连续监测readjustment of gas pressures to provide a stable gas气体压力提供一个稳定的气体调整flow.流。

美国Brooks质量流量控制器 Brooks 5850E质量流量控制器DESIGN FEATURES设计特点：

Easy maintenance

易于维护

Fast flow response to command changes

快速流指令变化的响应

Negligible flow overshoot/undershoot

忽略不计流量过冲/下冲

Removable sensor

移动传感器

Insensitive to mounting attitude

不敏感的安装姿态

Wide flow range (up to 30 slpm N2)

流量范围宽（可达30 SLPM N2）

End accessible zero and span potentiometers

端接近零点和量程电位器

Jumper selecable soft start

跳线可选的软启动

Electrically activated valve override

电动阀重写

Jumper selecable external valve control

跳线可选的外部控制阀

Low command flow cutoff

低命令流截止

Normally closed valve (normally open valve optional)

常闭阀（常开阀可选）

Mechanically and electrically compatible with other

机械和其他电兼容mass flow controllers质量流量控制器

Corrosion resistant valve

耐腐蚀阀门

美国Brooks质量流量控制器 Brooks 5850E质量流量控制器PRINCIPLE OF OPERATION操作原理：

The operating principle of the Brooks Mass Flow Controller

布鲁克斯的质量流量控制器的工作原理is thermodynamic. A precision power supply directs热力学。精密电源指示heat to the midpoint of the sensor tube carrying a热的传感器管承载的中点constant percentage of the flow. On the same tube的流量恒定百分比。在同一管equidistant upstream and downstream of the heat input的热输入等距的上游和下游are resistance temperature measuring elements.正电阻温度测量元件。With no flow, the heat reaching each temperature element没有流量，热量达到每个温度元件is equal. With increasing flow, the flow stream是平等的。随着流量的增加，流量流carries heat away from the upstream element, T1 and把热量从上游元件，T1和an increasing amount towards the downstream element,越来越多的向下游网元，T2. An increasing temperature difference developsT2。增加的温度差异发展between the two elements and this difference is这两个元素之间的这种差异proportional to the amount of gas flowing or the mass对气体流动或量的比例flow rate. A bridge circuit interprets the temperature流量。桥式电路对温度difference and an amplifier provides the output to the差放大器提供输出到control circuitry as well as 0-5 Vdc output signal.控制电路以及0~5伏直流电输出信号。The control circuitry compares the command setpoint控制电路比较指令设定to the flow signal and positions the precision solenoid对流量信号和位置精度螺线管control valve. When the command signal is below 2%控制阀。当命令信号低于2%of full scale, the control valve is positioned to fully全量表，控制阀的定位是充分closed. The control valve can be held fully open or封闭的。控制阀可以保持全开或closed by activation of the valve override circuit.由阀覆盖电路激活关闭。